Equipment | Category |
---|---|
YEILD ENGINEERING HMDS VAPOR PRIME OVEN | |
Karl Suss MA6/BA6 Aligner | Lithography |
Plasmatherm Versaline VLN ICP with Brooks Handler (TM) | Process Etch |
Plasmatherm Dual Chamber 790 PECVD & RIE | Dry Etch & Deposition |
Plasmatherm Versaline VLN ICP with Manual Load- Lock | Process Etch |
Plasmatherm 790 RIE | Process Etch |
Plasmatherm SLR 720 RIE | Process Etch |
Plasmatherm 790 PECVD | Deposition |
Plasmatherm 790 Dual Chamber PECVD/RIE | Process Etch |
Plasmatherm Dual Chamber 790 RIE & PECVD | Dry Etch & Deposition |
Plasmatherm 790 PECVD | Process Etch |