Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
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- Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
- Plasmatherm Versaline (VLN) ICP (Ion Coupled Plasma)Etcher
- Brooks TM (Transfer Module) with four Wafer Manual Load Lock
- Single ICP Chamber
- ENI ACG-6B RF Power Supply – 600W @ 13.56MHz with Seren AT6NVL Matchwork & MC2 Tunner
- ENI GMW-25A RF Power Supply – 2500W @2.0MHz with Seren AT25NVL Matchwork & MC2 Tunner
- VAT PM5 Pressure Controller with Leybold Turbo pump
- Seiko Seiki 1303CV Turbo Pump with Seiko Seiki SCU 750 controller
- Inter Cal Gate Valve
- (6) MFCs-gas with Isolation, Process and By-pass valves
- He Backside Cooling
- Watlow chabmer heater and controller
- Windows Based OS
- Vintage 2005 – Serial # 10171061
- 208V, 60 Hz, 3 phase
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
Plasmatherm Versaline VLN ICP with Brooks Handler (TM)