Plasmatherm Versaline VLN ICP with Brooks Handler (TM)
- Plasmatherm Versaline (VLN) ICP (Ion Coupled Plasma)Etcher
- Brooks TM (Transfer Module) with four Wafer Manual Load Lock
- Single ICP Chamber
- Inter Cal Gate Valve
- ENI ACG-6B RF Power Supply – 600W @ 13.56MHz with Seren AT6NVL Matchwork & MC2 Tunner
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Description
- Plasmatherm Versaline (VLN) ICP (Ion Coupled Plasma)Etcher
- Brooks TM (Transfer Module) with four Wafer Manual Load Lock
- Single ICP Chamber
- ENI ACG-6B RF Power Supply – 600W @ 13.56MHz with Seren AT6NVL Matchwork & MC2 Tunner
- ENI GMW-25A RF Power Supply – 2500W @2.0MHz with Seren AT25NVL Matchwork & MC2 Tunner
- VAT PM5 Pressure Controller with Leybold Turbo pump
- Seiko Seiki 1303CV Turbo Pump with Seiko Seiki SCU 750 controller
- Inter Cal Gate Valve
- (6) MFCs-gas with Isolation, Process and By-pass valves
- He Backside Cooling
- Watlow chabmer heater and controller
- Windows Based OS
- Vintage 2005 – Serial # 10171061
- 208V, 60 Hz, 3 phase
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