Plasmatherm 790 RIE
- Manual Load Lock, Single Chamber
- Advanced Energy RF5S- 500W RF power supply for lower electrode with AM5 match work and controller,
- Leybold 361C turbo pump with NT20 controller
- 11″ Electrode and 11″ showerhead
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Description
- Manual Load Lock, Single Chamber
- Advanced Energy RF5S- 500W RF power supply for lower electrode with AM5 match work and controller,
- Leybold 361C turbo pump with NT20 controller
- 11″ Electrode and 11″ showerhead
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