Plasmatherm 790 Dual Chamber PECVD/RIE
- Manual Load, Non-Load Lock
- Single Chamber
- Advanced Energy RF5S- 500W RF power supply for lower electrode with AM5 match work and PS2 controller
- Watlow Heater controller for lower electrode heater plates – Temperature up to 350C
- Six (4) MFCs with capabilities up
- PECVD 11″ lower electrode Platten
Price:
Description
- Manual Load, Non-Load Lock
- Single Chamber
- Advanced Energy RF5S- 500W RF power supply for lower electrode with AM5 match work and PS2 controller
- Watlow Heater controller for lower electrode heater plates – Temperature up to 350C
- Six (4) MFCs with capabilities up
- PECVD 11″ lower electrode Platten
- RIE 10″ lower electrode Platen
- Upper chamber shower head on both chamber
- Window OS with Sysmon software
- Ebara Turbo pump with controller
- 208V, 60 Hz, 3 phase
Product Gallery
Related Product
MKS 286 Pressure Controller
MKS 286 Pressure Controller Item # 1005624 Serial # 75332-6-6B Dual Thermocouple Readings
$275.00
Add to Cart 
SMC NAR2060 -NO2 Regulator with VTA302-UIB980514 solenoid Assembly
1/4″ push tube fittings Push Tube fittings
NorthEast Fluidics 3 Way Air Valve #2012
NEW Northeast Fluidics 3 Way Air Valve Division of Clippard Model # 2012