Matrix 105 Etcher
- Plasmatherm Versaline (VLN) ICP (Ion Coupled Plasma)Etcher
- Manual Load Lock for Single or Mulitple Wafers
- Single ICP Chamber
- ENI ACG-6B RF Power Supply – 600W @ 13.56MHz with Seren AT6NVL Matchwork & MC2 Tunner
- ENI GMW-25A RF Power Supply – 2500W @2.0MHz with Seren AT25NVL Matchwork & MC2 Tunner
- VAT PM5 Pressure Controller with Leybold Turbo pump
Price:
Description
- Plasmatherm Versaline (VLN) ICP (Ion Coupled Plasma)Etcher
- Manual Load Lock for Single or Mulitple Wafers
- Single ICP Chamber
- ENI ACG-6B RF Power Supply – 600W @ 13.56MHz with Seren AT6NVL Matchwork & MC2 Tunner
- ENI GMW-25A RF Power Supply – 2500W @2.0MHz with Seren AT25NVL Matchwork & MC2 Tunner
- VAT PM5 Pressure Controller with Leybold Turbo pump
- Seiko Seiki 1303CV Turbo Pump with Seiko Seiki SCU 750 controller
- VAT Gate Valve and controller
- (5) MFCs-gas with Isolation, Process and By-pass valves
- He Backside Cooling
- Watlow chamber heater and controller
Product Gallery
Related Product
MKS 286 Pressure Controller
MKS 286 Pressure Controller Item # 1005624 Serial # 75332-6-6B Dual Thermocouple Readings
$275.00
Add to Cart 
Technics Inc. 30KHz RIE RF Power Supply
Technics Inc. 30 KHz RIE RF Power Supply 30KHz 110VAC 8 Amps Air Cooled Serial#…
