STS Multiplex RIE

• 2001 Vintage
• Standard RIE (Reactive Ion Etch) MESC Multiplex
• ENI ACG3G 300/30 watt(13.56 MHz) RF power supply & matching network
• Currently 6″ configuration
• Non-clamp system with DI water cooled chuck (+5 to -40 degrees C)
• Manual load lock
• Remote gas box – Currently with 4 gas lines (O2,Ar,CF4, CHF3)
• Pfeiffer TH521 PC turbo