STS ICP (ASE) Advanced Silicon Etch Multiplex System
- Currently configured for 150mm wafers
- Manual load lock – Carousel Loader
- He Backside Cooling 150mm clamp configuration
- ENI ACG-3 300/30 Watt 13.56MHz RF power supply
- with an ENI ACG-10B 1KW 13.56MHz RF Upper Electrode power supply
- Pfeiffer TMH 1000PC Turbo pump with Pfeiffer Turbo Controller
- Remote gas panel – 4 MFCs
- MAC Cassette to Cassette Loader can be an option
- 208V, 60Hz, 50A 3 phase
