STS ICP (ASE) Advanced Silicon Etch Multiplex System
- STS ICP (ASE) Advanced Silicon Etch Multiplex System
- 200o Vintage – Currently configured for 150mm wafers
- Manual load lock
- He Backside Cooling 150mm clamp configuration
- ENI 300/30 Watt 13.56MHz RF power supply
- with an ENI ACG-10B 1KW 13.56MHz RF Upper Electrode power supply
- Leybold Mag 2000CT Turbo pump with Leybold Mag Drive Controller
- OnBoard gas panel – 4 MFCs
- MAC Cassette to Cassette Loader can be an option
- 208V, 60Hz, 50A 3 phase
