Oxford 90 RIE System
- Oxford 90 RIE Plasma Etcher
- Pfeiffer Turbo TPH330PC on RIE Chamber with TCP 380 Controller
- Pfeiffer Turbo TMH260C on Load Lock with TCPO 380 Controller
- Advanced Energy RFX-600
- Advanced Energy TCM RF Controller
- MKS 152 Pressure Controller
- Computer with some backup software
- 208V 60Hz
