Plasmatherm SLR 720 RIE

• Plasmatherm Shuttlelock 720 RIE (Reactive Ion Etch) Etcher
• Load Lock Shuttle Lock transfer
• Single chamber RIE
• RFPP–RF5S RF power supply w/AM5 Matchwork and PS2 Tunner
• Butterfly Valve and Throttling Gate Valve with Leybold Turbo pump
• (4) MFCs-gas
• 208V, 60 Hz, 3 phase