Plasmatherm 790 Dual Chamber PECVD/RIE

• Manual Load, Non-Load Lock
• Single Chamber
• Advanced Energy RF5S- 500W RF power supply for lower electrode with AM5 match work and PS2 controller
• Watlow Heater controller for lower electrode heater plates – Temperature up to 350C
• Six (4) MFCs with capabilities up
• PECVD 11″ lower electrode Platten
• RIE 10″ lower electrode Platen
• Upper chamber shower head on both chamber
• Window OS with Sysmon software
• Ebara Turbo pump with controller
• 208V, 60 Hz, 3 phase