Perkin Elmer 4400 Round Target Sputtering System
(3) Round Targets – targets and backing plates not included
RF Deposition with etch
Advanced energy RFG 1250 RF power supply
Advanced Energy RFG/AZX RF controller
CTI On board 8 Cryopump with Fast Regen Controller
307 Granville Phillps Ion Gauge Controller
MKS 270 Signal Controller
