MRC 643 Horizontal Sputtering System
CTI 4 Cryo pump on Load Lock chamber
Preheat Station
CTI Cryo 8 pump for main chamber
RF etch Station
(3) DC cathode
(3) gas channels
MRC 643 Horizontal Sputtering System
CTI 4 Cryo pump on Load Lock chamber
Preheat Station
CTI Cryo 8 pump for main chamber
RF etch Station
(3) DC cathode
(3) gas channels
