Plasmatherm SLR 720 RIE
- Plasmatherm Shuttlelock 720 RIE (Reactive Ion Etch) Etcher
- Load Lock Shuttle Lock transfer
- Single chamber RIE
- RFPP–RF5S RF power supply w/AM5 Matchwork and PS2 Tunner
- Leybold TurboVac Controller
- Butterfly Valve and Throttling Gate Valve with Leybold Turbo pump
- Ion Gauge with MKS Controller
- (4) MFCs-gas
- 208V, 60 Hz, 3 phase
