Plasmatherm SLR 720 RIE “A”

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Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE

Plasmatherm Shuttlelock 720 RIE (Reactive Ion Etch) Etcher
Load Lock Shuttle Lock transfer
Single chamber RIE
RFPP–RF5S RF power supply w/AM5 Matchwork and PS2 Tunner
Butterfly Valve and Throttling Gate Valve with Alcatel Turbo pump
(5) MFCs-gas
208V, 60 Hz, 3 phase

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

Plasmatherm SLR 720 RIE “A”

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