Plasmatherm 790 PECVD | Deposition System
- Manual Load, Non-Load Lock
- Single Chamber
- Advanced Energy RF5S- 500W RF power supply for lower electrode with AM5 match work and PS2 controller
- Watlow Heater controller for lower electrode heater plates – Temperature up to 350C
Price:
Description
- Manual Load, Non-Load Lock
- Single Chamber
- Advanced Energy RF5S- 500W RF power supply for lower electrode with AM5 match work and PS2 controller
- Watlow Heater controller for lower electrode heater plates – Temperature up to 350C
- Six (4) MFCs with capabilities up to Eight (8) MFCs
- 11″ lower electrode Platten
- Upper chamber shower head
- 208V, 60 Hz, 3 phase
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