Plasmatherm 790 PECVD

• Manual load, non-load lock system
• Heated lower electrode with Watlow Controller
• Advanced Energy RF5S 500W 13.56MHz power supply with match work and PS2 tuner
• Windows based OS
• 208V 60A 50/60Hz
• Manual load, non-load lock system
• Heated lower electrode with Watlow Controller
• Advanced Energy RF5S 500W 13.56MHz power supply with match work and PS2 tuner
• Windows based OS
• 208V 60A 50/60Hz